TG420M型日本大坂真空OSAKA VACUUM磁懸浮型渦輪分子泵用于半導體生產北崎熱賣

Volume flow rate

N2 (L/s)

400

N(with protective

screen) (L/s)

370

H2 (L/s)

300

Max. compression ratio

N2

1×108

H2

4.5×103

Base pressure

VG?ISO-B/CF (Pa)

<1×10<1×10

VG?ISO-B/CF (Torr)

<7.5×10<7.5×10

Max. throughput※1

N2 (sccm)

2000

Startup time

(min)

2~3

Shutdown time

(min)

4~5

Max. backing pressure

(Pa / Torr)

400 / 3

Recommended backing

vacuum pump

(L/min)

≧160

Position

Any orientation

Weight (kg)  VG?ISO-B/CF

14 / 17

Controller

TC010MA

Special specifications

*Contact our sales representative for 
more information.

-Chemical-use

-Thermal insulation

TG-MI

-Ultra low vibration

TG-ML